本篇論文將PERC太陽能電池元件使用雷射雕刻方式來促進鋁與矽結合，形成BSF層，提高效率。
本實驗室有研究石墨烯的衍生物，石墨烯是由三維結構石墨撥出單層二維結構石墨烯，其特性第三章會做介紹，作為太陽能電池輔助和未來方向。
本篇的太陽能電池以業界PERC為基準，將未開洞的試片去濺鍍鋁，再進行雷射開洞，可藉由雷射光將鋁打穿鈍化層與矽幾乎完全接觸並擴散形成BSF層，測試之後確實效率有明顯提升，如此低溫製程可以有如此高的效率，值得後續持續研究，也能避免過高溫的擴散過程對氧化石墨烯產生的破壞。
隨後，將目標放在雷射參數上，藉由用雷射燒結法打穿SiON鈍化層，讓鋁進入與矽做結合，找到一個最佳數值。
上面製程確實可行之後，在PERC基板跟鋁之間加入氧化石墨烯，氧化石墨烯特性具有固定負電荷，可排斥少數載子電子，降低復合率，將效率再提高。

In this study, PERC solar cell components are laser-fired contact to promote the combination of aluminum and silicon to form a BSF layer for improved efficiency.
This laboratory has studied the derivatives of graphene. Graphene is a single-layer two-dimensional structure graphene extracted from three-dimensional structure graphite. Its characteristics will be introduced in Chapter 3 as solar cell auxiliary and future direction.
The solar cell of this article is based on the industry PERC, and the unopened test piece is sputtered with aluminum, and then the laser fired contact. The aluminum can be penetrated through the passivation layer to almost completely contact with the silicon and diffuse to form the BSF layer.
After the test, the efficiency is obviously improved. Such a low-temperature process can have such high efficiency, and it is worthwhile to continue the research in the future, and can also avoid the damage of the graphene oxide caused by the high-temperature diffusion process.
Subsequently, the target is placed on the laser parameters, and the passivation of the SiON passivation layer by laser sintering is used to combine the aluminum into the silicon to find an optimum value.
After the above process is feasible, the graphene oxide is added between the PERC substrate and the aluminum. The graphene oxide has a fixed negative charge which can repel a few carrier electrons, reduce the recombination rate, and further improve the efficiency.
Keywords: PERC solar cell、laser fired contact、BSF layer、graphene oxide、fluorinated graphene

致謝 I
摘要 III
Abstract IV
圖目錄 VII
表目錄 X
第一章 緒論 1
1.1前言 1
1.2研究動機 3
1.3論文架構 4
第二章 原理及文獻探討 5
2.1 太陽能電池運作原理 5
2.1.1 太陽能電池結構 5
2.1.2 光伏效應 5
2.1.3半導體中復合過程 8
2.1.4 太陽能電池效率相關參數 9
2.2 太陽能電池鈍化效果 12
2.2.1鋁背電場(Back Surface Field) 12
2.2.3 鈍化層(Passivation Layer) 13
2.2.4氧化層電荷 14
第三章 石墨烯特性與製程介紹 17
3.1 氧化石墨烯特性 17
3.1.1氧化石墨烯結構與特性說明 17
3.1.2氧化石墨烯製程 18
3.2 氟化石墨烯特性 19
3.2.1氟化石墨烯結構與特性說明 19
3.2.2氟化石墨烯製程 20
3.3 少數載子Lifetime分析 21
3.4 Lifetime樣品製程 22
3.5 製程儀器及軟體介紹 23
3.5.1 快速熱退火(RTA) 23
3.5.2 載子壽命(Lifetime)儀器軟體 25
3.6 氧化石墨烯及氟化石墨烯實驗結果 28
3.6.1 氧化石墨烯實驗結果 28
3.6.2 氟化石墨烯實驗結果 32
3.6.3 氟化石墨烯缺點探討 35
第四章 PERC太陽能電池製作 51
4.1 太陽能電池製程 51
4.2 實驗流程 53
4.3實驗結果與討論 55
4.3.1 探討兩種不同PERC轉換效率 55
4.3.2 未開洞的PERC基板太陽能電池雷射燒結參數 57
4.3.3確認雷射效果BSF層形成 60
4.3.4加入氧化石墨烯的太陽能電池轉換效率 63
第五章 總結與未來方向 69
5.1 總結 69
5.2 未來方向 70
參考文獻 71

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