本研究探討氣相沉積金屬氧化物的磊晶成長機制，以及成長條件對磊晶結構與性質的影響。實驗觀察金屬鋅蒸氣在藍寶石Al2O3(0001)基板表面經氣凝(gas condensation)形成磊晶氧化鋅的形貌、晶體結構與光學性質表現。在550oC-750oC溫度範圍基板表面的氧化鋅以磊晶模式主導其成長，改變鋅蒸氣傳輸距離(< 8.0 mm)，可調控形成二維膜狀或一維柱狀奈米線晶體，歸因於低氧條件下的不同成核速率以及VS(Vapor- solid)、VLS(Vapor–liquid–solid)不同介面成長機制。本研究增進磊晶成長的理解，工作圖譜可應用於調控晶體成長與吸收、激子放射等光學表現。

Epitaxial growth mechanisms during gas-phase deposition and effects of the growth conditions on the crystal’s structure and properties have been investigated. We experimentally followed the formation of epitaxial zinc oxide (ZnO) on the substrate’s Al2O3(0001) surface and the resulted morphology, crystalline structure, and optical properties. An epitaxial mode was found to dominate the growth of ZnO, which can be tuned by changing the transport distance of Zn vapor (< 8 mm), leading to 2D film-like or 1D rod-shaped-nanowire crystals. This was ascribed to the nucleation rate and the different mechanisms of the VS(Vapor- solid) and VLS(Vapor–liquid–solid) interface growth. This research has improved the understanding of epitaxial growth. The operation diagrams established in this work can be applied for tuning the crystal’s growth and optical properties like absorption and excitonic emission.

第1章 研究背景與動機 1
1.1 研究動機 1
1.2 文獻回顧 2
1.2.1 磊晶成長模式與熱力學條件 2
1.2.2 表面形貌與運動學條件 3
1.3 研究問題 6
第2章 實驗方法 7
2.1 氣相沉積 7
2.2 使用單加熱器 7
2.3 使用雙加熱器 9
2.4 觀察光致發光 10
2.4.1 儀器規格 10
2.4.2 撷取光致發光光譜 12
2.5 撷取吸收光譜 13
2.5.1 儀器規格 13
2.5.2 量測系統 13
2.6 X光繞射 13
第3章 實驗結果 15
3.1 表面形貌 15
3.2 晶體結構 19
3.3 光致發光 27
3.4 吸收光譜 35
第4章 結論與討論 45
4.1 實驗結果總結 45
4.2 成長模式、磊晶條件 46
4.3 成核、成長模式與光學表現特徵 50
4.4 調控光學性質 53
附錄 A XRD圖譜 55
附錄 B 使用雙加熱器沉積實驗 57
附錄 C 樣品照片 60
附錄 D 氣相沉積樣品表面形貌SEM影像 62
附錄 E 加熱器溫度分佈 68
參考文獻 70

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