本研究以ZnO/Al2O3(0001)為高失配材料模型系統，使用蒸氣傳輸沉積法形成磊晶氧化鋅，利用SEM、XRD方法觀察，探討製備條件對沉積奈米結構的形貌與磊晶序度的影響。此外，在10K-300K不同溫度下測量氧化鋅的激子螢光行為與偏振效應、光學吸收，藉此評估不同形貌與結晶/磊晶品質對氧化鋅光學光學性質的影響。我們發現，控制溫度、傳輸蒸氣的鋅/氧濃度比、傳輸距離可調控氧化鋅的形貌與磊晶結構序度。1D奈米線與2D薄膜均未表現與氧化鋅形貌、磊晶方向相關的本徵(intrinsic)偏振效應。相較於高溫退火的濺鍍氧化鋅薄膜，磊晶氧化鋅表現可見光螢光相對強度較低、激子螢光譜峰能量較高且峰寬較小、吸收光譜的激子共振峰較顯著，可歸因於磊晶氧化鋅的較佳結晶品質、較低缺陷濃度。觀察光致螢光的激激發強度相依發現，磊晶氧化鋅奈米線在低溫(< 20 K)表現激子雷射特徵。
 

Effects of conditions of vapor transport deposition on morphology and epitaxial ordering of the deposited nanostructures, taking ZnO/Al2O3(0001) as a model system for highly mismatched materials, have been investigated using SEM and XRD. Excitonic luminescence, its polarization effects, and absorbance were measured at 10K-300K, revealing the impacts of morphology and crystallization/epitaxy quality on the optical properties of ZnO. We found that tuning the deposition temperature, Zn/O vapor ratio, and vapor transport distance may control the morphology and epitaxial ordering of obtained zinc oxide.
 

摘要 iii
Abstract iv
目錄 v
圖目錄 vi
表目錄 ix
第1章 緒論 1
1.1 簡介 1
1.2 研究問題 2
第2章 磊晶原理與自對齊非等向晶體成長 3
2.1傳統的磊晶成長模式(近熱力學平衡) 3
2.2 運動學條件 5
2.3 非等向晶體成長(non-isotropic crystal growth)與成長模式 8
第3章 樣品製備與量測方法 10
3.1 氣相沉積儀建構 10
3.2 樣品製備程序 12
3.3 x射線繞射法 12
3.4 光致螢光(photoluminescence PL)與吸收度(absorbance)觀察方法 18
第4章 晶體結構與形貌 22
4.1 表面形貌 23
4.2 晶體結構與磊晶關係 29
第5章 光學性質 43
5.1 室溫光致螢光 43
5.2 光學偏振效應 49
5.3 室溫吸收度 53
5.4 變溫光學量測 56
第6章 討論、結論與展望 65
附錄 69
參考文獻 73

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