本研究以熱門研究材料氧化石墨烯（GO）在氧化鋁（Al2O3）基座結構上為研究主軸，希望藉此改善LED基座的散熱表現，並針對其製備方法、塗佈應用、電性量測、基座表面處理等各方面進行分析與應用。實驗從中先是發現若使用滴覆（Drop）法進行氧化石墨烯塗塗佈於結構表面，對於薄膜片電阻量測會因表面分佈的不均勻發生數據不對稱，因此我們利用改進的噴塗技術（Spray）法，使其能將GO薄膜更加均勻塗佈於基座上，並同時量測載子生命週期（lifetime）結果得以優化提升；再者利用濕式化學法（Wet Chemistry）在p型矽基座進行清潔及原子層沉積（ALD）氧化鋁，並以表面片電阻數據與溶劑的清潔程度作為依據，進而分析其對片電阻值的影響。我們發現GO及Al2O3的雙層結構，經過快速熱退火後表面會有金屬態的鋁被還原。在確立了上述條件後將此技術運用於藍寶石基座（Sapphire）上以進行還原反應，最後以X射線光電子能譜學（XPS）進行GO與氧化鋁之表面分析。

This study takes the popular research material graphene oxide (GO) on the aluminum oxide (Al2O3) base structure as the main research axis, hoping to improve the heat dissipation performance of the LED base, and aiming at its preparation method, coating application, electrical properties analysis and application in various aspects such as measurement and base surface treatment. From the experiment, it was first found that if the drop method is used to coat graphene oxide on the surface of the structure, the measurement of thin film sheet resistance will cause data asymmetry due to uneven surface distribution. Therefore, we use the improved spraying technology (Spray) method, so that it can coat the GO thin film on the substrate more uniformly, and at the same time measure the carrier lifetime results to optimize and improve; moreover, use the wet chemistry method (Wet Chemistry) on the p-type silicon substrate .The seat is cleaned and atomic layer deposition (ALD) aluminum oxide is carried out, and the surface sheet resistance data and the cleanliness of the solvent are used as the basis to analyze its influence on the sheet resistance value. We found that the double-layer structure of GO and Al2O3, after rapid thermal annealing, the metallic aluminum on the surface will be reduced. After the above conditions are established, this technology is applied to the sapphire base for reduction reaction, and finally the surface analysis of GO and alumina is carried out by X-ray photoelectron spectroscopy (XPS).

目錄 I
圖目錄 III
表目錄 V
致謝 VI
摘要 1
Abstract 2
第一章 緒論 3
1.1 前言 3

1.2 研究動機 5

1.3 論文架構 6

第二章 LED基板及散熱關係介紹 7

2.1 LED常用之陶瓷基板 (Ceramic Substrate) 介紹 7

2.2 LED 原理結構與散熱機制 10

2-3 熱導率與熱阻及電阻率片電阻介紹 13

第三章 清潔方式對基座片電阻影響 17

前言 17

3.1 基座清潔之氧化石墨烯懸浮液塗佈氧化鋁薄膜實驗 17

3.2 儀器介紹 19

3.3 氧化石墨烯懸浮液介紹與製備 22

3.4 晶片表面清潔介紹 23

3.5 結果分析 24

第四章 氧化石墨烯塗佈改善實驗 27

前言 27

4.1 實驗介紹 27

4.2 儀器介紹 28

4.3 實驗步驟 30

4.4 結果分析 34

第五章 藍寶石基座塗佈GO研究 41

前言 41

5.1 X射線光電子能譜學 41

5.2 藍寶石基座塗佈實驗 44

5-3 結果分析 45

第六章 總結 55

結論 55

未來方向 55

參考文獻 57

附件 61

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