我們利用磁控磁控濺鍍法製成LBSO薄膜。以固定BSO靶功率並透過改變La靶的遮蓋及功率有無觀察在La不同條件摻雜下以利用EDS的元素分析觀察La濃度的變化。再透過XRD的觀察可以發現在經由退火650°C後La摻雜與未摻雜之BSO的結晶優選方向的改變。並且在La靶的遮蓋有無參數對比下，我們可以對比在有無遮蓋前後隨著La靶功率上升La濃度趨勢變化。
透過LBSO不同退火溫度下可以觀察到650°C退火是可以使LBSO完整結晶。而在600°C退火環境會是容易受到La的濃度而影響LBSO的擴散。代表600°C退火下我們可以觀察到La摻雜量對於LBSO結晶的影響。

We have fabricated LBSO thin films using the magnetron sputtering method. By keeping the BSO target power constant and varying the coverage and power of the La target, we observed the changes in La concentration under different doping conditions using EDS (Energy Dispersive X-ray Spectroscopy) elemental analysis. Furthermore, through XRD (X-ray Diffraction) observations, we observed changes in the preferred crystalline orientation of the LBSO film due to La doping after annealing at 650°C. Additionally, we compared the La concentration trend with increasing La target power before and after coverage, based on whether the La target was covered or not.
By annealing LBSO at different temperatures, we found that annealing at 650°C resulted in complete crystallization of LBSO. However, under a 600°C annealing environment, the diffusion of La significantly affected the LBSO film due to changes in La concentration. This indicates that the amount of La doping at 600°C annealing has a noticeable impact on the crystallization behavior of LBSO.

摘要 I
Abstract III
目錄 V
圖目錄 IX
第一章 序論 1
1.1 前言 1
1.2 研究動機 4
第二章 文獻回顧 5
2.1 鈣鈦礦結構 5
2.2 LBSO材料介紹 6
第三章 實驗系統及研究方法 9
3.1 實驗規劃 9
3.2 實驗前置準備 11
3.3 實驗設備 12
3.3.1 磁控濺鍍系統 12
3.3.2 試片製備 13
3.3.3 實驗製程 15
3.4 實驗操作流程及參數 16
3.4.1 實驗操作流程 16
3.4.2 實驗參數 17
3.5 分析方法 19
3.5.1 紫外光/可見光吸收光譜儀分析(UV-visible) 19
3.5.2 3D輪廓儀(3D-surface profiler) 22
3.5.3 場發射掃描式電子顯微鏡(FE-SEM) 24
3.5.4 X光繞射分析(XRD) 26
第四章 結果與討論 29
4.1 LBSO La靶材無遮蓋分析比較(無退火) 29
4.1.1 EDS元素分析 29
4.1.2 UV-visible與Tauc plot分析 33
4.1.4 FESEM的表面形貌分析 38
4.1.5 3D輪廓儀薄膜厚度量測結果 40
4.1.6 無退火試片之小結論(La靶材無遮蓋): 43
4.2 LBSO 650°C退火試片分析比較(La靶材無遮蓋) 44
4.2.1 EDS元素分析 44
4.2.2 UV-visible與Tauc plot分析 46
4.2.4 FESEM的表面形貌分析 68
4.2.5 3D輪廓儀薄膜厚度量測結果 88
4.2.6 LBSO 650°C退火試片之小結論(La靶材無遮蓋): 92
4.3 LBSO 600°C退火試片分析比較(La靶材有遮蓋): 93
4.3.1 EDS元素分析 94
4.3.2 UV-visible與Tauc plot分析 96
4.3.4 FESEM的表面形貌分析 113
4.3.5 LBSO 600°C退火試片之小結論(La靶材有部分遮蓋): 126
4.4 無La摻雜之BSO退火試片與LBSO 650°C及600°C退火試片XRD結晶峰值分析比較: 127
第五章 結論 131
第六章 未來工作 133
參考文獻 135

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